KITEC offers metrology systems for applications including non-contact resistance and resistivity measurement, wafer inspection, optical defect inspection, wafer edge defect inspection and wafer topography inspection.
Non-contact resistivity measurement determines the electrical resistance or resistivity of a wafer without making physical electrical contact with the sample. KITEC offers systems for semiconductor applications with resistivity measurement and mapping capabilities.
Depending on the system, KITEC's non-contact resistance and resistivity measurement solutions can support wafer diameters of up to 300 mm.
Wafer resistivity mapping measures the electrical resistivity at multiple positions across a wafer. This creates a spatial map of resistivity variations and can be used for process monitoring and quality control.
Yes. KITEC offers non-contact measurement systems designed for different resistivity ranges, including applications involving low-resistivity and high-resistivity samples.
KITEC provides optical defect inspection, wafer edge defect inspection, visual wafer inspection and wafer topography inspection solutions.
Depending on the inspection system, KITEC solutions can detect and document surface defects, macro defects, micro defects, wafer edge damage, broken or chipped wafer edges and micro cracks. Inspection capabilities depend on the specific system and application.
Yes. Selected KITEC optical defect inspection systems are designed for inspecting substrate wafers, EPI wafers, patterned wafers, diced wafers, dies and individual samples.
Yes. Selected KITEC inspection systems can inspect diced wafers, dies and individual samples in addition to complete wafers.
Wafer edge defect inspection is the automated or semi-automated examination of the edge of a wafer to identify defects such as chips, breaks and micro cracks. KITEC offers systems that can profile wafer edges and provide graphical inspection results and defect logging.
Yes. Depending on the inspection system, results and inspection data can be exported in formats such as KLARF or CSV. Selected systems can also provide communication with manufacturing systems.
KLARF is a standardized data format used in semiconductor manufacturing to describe wafer inspection and defect data. Selected KITEC inspection systems can generate or communicate inspection results using KLARF.
A wafer ID reader automatically reads identification information marked on a wafer. KITEC wafer ID reader systems can read wafer identification on the frontside, backside or both sides of a wafer.
Yes. KITEC wafer ID readers can provide communication interfaces such as TCP/IP and, depending on the configuration, options such as SECS/GEM, barcode or RFID communication.
The supported wafer size depends on the specific system configuration. KITEC offers wafer identification solutions for semiconductor manufacturing applications and can provide application-specific configurations.
Process tool automation connects and automates the handling of wafers between process equipment and wafer carriers. It can reduce manual handling, improve repeatability and support more efficient semiconductor manufacturing workflows.
In many applications, existing manual wafer handling processes can be automated or partially automated. The appropriate solution depends on the existing equipment, wafer size, carrier type, process requirements and required interfaces.
Yes. KITEC solutions can be used in semiconductor production, process development, laboratories and other microelectronics environments. The appropriate level of automation can range from manual equipment to fully automated wafer handling
The right system depends on several factors, including wafer diameter, wafer material, carrier type, required throughput, manual or automatic operation, alignment requirements, identification requirements, ESD requirements and available communication interfaces. KITEC can help evaluate these requirements and recommend a suitable solution.
The appropriate inspection system depends on the inspection task. Optical defect inspection is suitable for identifying and mapping surface defects, while wafer edge inspection focuses on the wafer edge. Visual wafer inspection and wafer topography inspection address other specific inspection requirements.
For semiconductor wafer automation, KITEC offers solutions including automatic wafer transfer systems, wafer sorters, wafer aligners, wafer ID readers and process tool automation. The appropriate solution depends on the required workflow and level of automation.
KITEC works with customers to identify suitable equipment and configurations for specific wafer handling, metrology and automation applications. Available customization depends on the selected system and technical requirements.
Customers can contact KITEC directly with their application requirements, wafer size, process information and desired level of automation. KITEC can then help identify the appropriate product or solution.
KITEC microelectronic technologie GmbH can be contacted by email at info@kitec.de or by telephone at +49 451 70323007. The company is located in Lübeck, Germany.