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23569 LÜBECK
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Metrology
Non Contact Resistance and Resistivity Measurement
Optical Defect Inspektion
Wafer Edge Defect Inspection
Visual Wafer Inspection
Wafer Transfer Systems
Wafer Handling Systems
Wafer Tools
Wafer Sorter
Wafer ID Reader
Vacuum Wands
Process Tool Automation
Contact
Home
Metrology
Non Contact Resistance and Resistivity Measurement
Optical Defect Inspektion
Wafer Edge Defect Inspection
Visual Wafer Inspection
Wafer Transfer Systems
Wafer Handling Systems
Wafer Tools
Wafer Sorter
Wafer ID Reader
Vacuum Wands
Process Tool Automation
Contact
Wafer Tools
Further information
Wafer Aligner
Manual flat aligner for wafer sizes 100mm or 150mm
Universell manual flat aligner for wafer sizes 2”, 3”, 100mm and 150mm
Manual Notch Aligner
Manual notch aligner for wafer size 150mm or 200mm
Automatic flat aligner
Automatic flat aligner for wafer size 100mm or 150mm
Automatic notch aligner
Automatic notch aligner for wafer size 200mm or 150mm
Wafer Transfer – K-Push
Horizontal wafer slide transfer systems provide quick and safe transfer of wafer – from cassette to cassette.
SEMI approved
Wafer sizes from 100mm to 200mm
Manual or automatic
Cassettes with high profile and low profile
With safety lock. Platform will not move without receiving cassettes
Small footprint
ESD models available
Further transfer possibility: flip option; split option
Manual Wafer Stair Step Lift
Pusher with stair-steps profile lift wafer to read wafer ID for example.
Cassade Wafer Presenter
Automatically aligns and lifts the wafer for easy view of wafer ID
For wafer sizes 150mm or 200mm
Wafers are lifted gently in a stair-step array
Wafer Counter
Counts and map wafer in the cassette
Identifies empty slots
For wafer sizes 150mm or 200mm
Can be designed for other wafer sizes
RS 232 serial communication port option
Single Wafer Lifter
Manual flat aligner for wafer sizes 100mm or 150mm
Gently lifts a single, selected wafers from a cassette
Locks the wafer securely with edge grip in the removable handle
Handle with wafer may be removed for e.g. inspection
For wafer sizes 150mm or 200mm
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