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Metrology
Non Contact Resistance and Resistivity Measurement
Optical Defect Inspektion
Wafer Edge Defect Inspection
Visual Wafer Inspection
Wafer Transfer Systems
Wafer Handling Systems
Wafer Tools
Wafer Sorter
Wafer ID Reader
Vacuum Wands
Process Tool Automation
Contact
Home
Metrology
Non Contact Resistance and Resistivity Measurement
Optical Defect Inspektion
Wafer Edge Defect Inspection
Visual Wafer Inspection
Wafer Transfer Systems
Wafer Handling Systems
Wafer Tools
Wafer Sorter
Wafer ID Reader
Vacuum Wands
Process Tool Automation
Contact
Wafer Transfer Systems
Further information
Gemini
Semi-automatic, vertical wafer handling system
Wafer size 150mm or 200mm
Transfer from cassette to cassette
Small footprint
Safety sensor for cassette and wafer
Automatic home position
Aligner option
Comet – Monostation
Semi-automatic wafer handling system for wafer size from 3“ to 200mm
Wafer handling system
Transfer from cassette to cassette / boat
Alinger for flat or notch
Communication with computer via RS232
ESD option
Comet – 2-Station
Automatic wafer handling system to transfer wafer
Wafer size from 3“ to 200mm
Cassette to cassette / boat
Communication with computer via RS 232
Safety sensor for cassette and wafer
Automatic home position
Possible option
BTB, pitch changing
Split 25 -> 12/13
SECS/GEM
Aligner o ESD
Comet – 3-Station
Automatic wafer handling system to transfer wafer
Wafer size from 3” to 200mm
Cassette to Cassette / Boat
Communication with computer via RS 232
Safety sensor for cassette and wafer
Automatic home position
Possible options
BTB, pitch changing
Split 25 -> 12/13, 50 -> 2x25
Merge 12/13 -> 25, 2x 25 -> 50
SECS/GEM
Aligner; ESD
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