KITEC microelectronic technologie

Wafer Sorter

Further information

Single Wafer Sorter

  • Wafer Handling System
  • Easy to operate
  • Wafer size from 100mm up to 300mm
  • Models with two, three or four loadports
  • Wafer ID reading – back and frontside
  • Integrated aligner
  • Automatic or manual handling
  • Automatic mapping
  • Cross or double slots detection
  • Customizable receipt
  • End effector with nuflon; handling with vacuum or edge contact
  • TCP/IP host connection
  • Possible options: Laminar flow / Ionizer / Fan filter unit

Table Top Sorter

  • Wafer Handling system
  • Wafer size 150mm or 200mm (combine both sizes together possible)
  • Two loadports
  • Automatic or manual handling
  • Automatic mapping
  • Cross or double slots detection
  • Customizable receipt
  • End effector with nuflon, handling with vacuum or edge contact
  • TCP/IP host connection
  • Possible options: Barcode reader / RFID reader
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