Automation with a lift for the boat to the furnace paddle including load and unload the boat from/to the buffer with handler change option Integration with the R2D COMET vertical wafer transfer system for automation from cassette to the furnace paddle and back Available for wafer sizes 150/200mm or 300mm automation.
LISA-AE ( Lift Six Axes – Automation Embedded )
Full automation horizontal furnace loader including POD opener dock and R2D COMET vertical wafer transfer system Transfer wafers from the cassette ( horizontal to vertical position option ) to the boat and load the boat by a 6 axis robot to the horizontal furnace paddle.
Integrated boat buffer
Boat handler change option
Customized including customer specified POD opener and retrofit to the horizontal furnace model
