Optical Defect Inspektion

nSpec LS defect inspection

Semi-automatic defect inspection system
Defect inspection for: Substrate wafer / EPI wafer / patterned wafer / Diced wafer / Dies and Individual samples
Create different receipt with rapid scanning, mosaicking user-specific way for presenting results, defect classification
Save image data for records or additional image processing with different parameter settings
Result data communication with different communication formats, e.g. KLARF
High resolution microscope with object lenses from 2,5x to 50x
LED lightning for BF;DF and DIC, transmitted light option
Motorized X/Y-Stage with 0.04µm increment
Wafer chuck for 2”,3”, 100mm, 150mm and 20mm or other sample holder available

Automatic defect inspection
Defect inspection for: Substrate wafer / EPI wafer / patterned wafer / Diced wafer / Dies Individual samples
Create different receipt with rapid scanning, mosaicking user-specific way for presenting results, defect classification
Save data as e.g. KLARF or CSV
High resolution microscope with objective from 2,5x to 50x
LED lightning for BF;DF and DIC, transmitted light option
Motorized X/Y-Stage with 0.04µm increment
Wafer chuck for 2”,3”, 100mm, 150mm and 20mm or other sample holder
Wafer loader with pre-aligner
Carrier and wafer size detection
OCR reader option
GEM/SECS Option

Automatic defect inspection
Defect inspection for: Substrate wafer / EPI wafer / patterned wafer / Diced wafer / Dies Individual samples
Create different receipt with rapid scanning, mosaicking user-specific way for presenting results, defect classification
Save data as e.g. KLARF or CSV
High resolution microscope with objective from 2,5x to 50x
LED lightning for BF;DF and DIC, transmitted light option
Motorized X/Y-Stage with 0.04µm increment
Wafer chuck for 100mm, 150mm , 200mm, 300mm
Wafer loader with pre-aligner
Carrier and wafer size detection
OCR reader option
GEM/SECS option