• Wafer Handling System

• Easy to operate

• Wafer size from 100mm up to 300mm

• Models with two, three or four loadports

• Wafer ID reading – back and frontside

• Integrated aligner

• Automatic or manual handling

• Automatic mapping

• Cross or double slots detection

• Customizable receipt

• End effector with nuflon; handling with vacuum or edge contact

• TCP/IP host connection

• Possible options

    o Laminar flow

    o Ionizer

    o Fan filter unit