Wafer ID Reader
• Reading wafer ID at the frontside, backside or both sides
• 12” Touchscreen
• Visual representation of wafer ID with corresponding to its slots
• For Cassette with 25 Slots
• Cogned 1741 or 1742 OCR
• Automatic mapping system
• TCP/IP host connection
• Possible Option:
o SECS/GEM Kommunikation
o Automatic BCR or RFID
