Wafer Edge Defect Inspection
• Production Level In-Line Measurement
• Stand-alone wafer edge inspection
• Integrated with cassette wafer loading
• Profiling the wafer edge
• Detection of broken and chipped wafer edges
• Detection of micro cracks on the wafer edge
• Detection of upper wafer edge defects or lower wafer edge defects
• Application for opaque and transparent wafers
• Classification according to SEMI Standards
• Graphical output of visual inspection results
• Log of wafer edge defects
• MES data export