SMLR-28

• Wafer Loader with one load port

• Suitable for wafers from 2" to 200mm

• Automatic recognition of the tray with the wafer diameter

• Tray mapper for recording the wafers in the tray

• Wafer transfer to right, left or both sides

• Operating software with GUI for displaying the operating status and operation

SMMP-468

• Wafer Loader with one load port

• Suitable for wafers from 100mm to 200mm

• Automatic recognition of the tray with the wafer diameter

• Tray mapper for recording the wafers in the tray

• Wafer handling port for options, individually or in combination

    - Wafer Aligner

    - Wafer backside lift

DM-28

• Wafer Loader with two load ports

• Suitable for wafers from 2" mm to 200mm

• Automatic recognition of the tray with the wafer diameter

• Tray mapper for recording the wafers in the tray

• Wafer handling port for configuration as additional source port or as reject port

• Wafer transfer to the right or left

• Operating software with GUI for displaying the operating status and operation

Microskop Loader

Visual inspection system with integrated wafer loader for marco and / or mirco inspection.

• Wafer size from 2” to 200mm

• Modular set up – configuration to meets with requirements possible

• End effector with back side vacuum or edge contact

• Cassette mapper with wafer size detection

• Manual or motorized X/Y stage

• Options o Top & backside marco inspection with green light

    o Pre-Aligner

    o 2 cassette elevators