Gemini
• Semi-automatic, vertical wafer handling system
• Wafer size 150mm or 200mm
• Transfer from cassette to cassette
• Small footprint
• Safety sensor for cassette and wafer
• Automatic home position
• Aligner option
Sticky Banners r2d
Sticky Banners de
Comet – Monostation
• Semi-automatic wafer handling system for wafer size from 3“ to 200mm
• Wafer handling system
• Transfer from cassette to cassette / boat
• Alinger for flat or notch
• Communication with computer via RS232
• ESD option
Comet – 2-Station
• Automatic wafer handling system to transfer wafer
• Wafer size from 3“ to 200mm
• Cassette to cassette / boat
• Communication with computer via RS 232
• Safety sensor for cassette and wafer
• Automatic home position
• Possible option
o BTB, pitch changing
o Split 25 -> 12/13
o SECS/GEM
o Aligner o ESD
Comet – 3-Station
•Automatic wafer handling system to transfer wafer
• Wafer size from 3” to 200mm
• Cassette to Cassette / Boat
• Communication with computer via RS 232
• Safety sensor for cassette and wafer
• Automatic home position
• Possible options
o BTB, pitch changing
o Split 25 -> 12/13, 50 -> 2x25
o Merge 12/13 -> 25, 2x 25 -> 50
o SECS/GEM
o Aligner; ESD
Wafer Handling Systems
