Gemini

• Semi-automatic, vertical wafer transfer system

• Wafer size150mm or 200mm

• Cassette to cassette

• Small footprint

• Safety sensor for cassette and wafer

• Automatic home position

• Aligner option

Comet Monostation

• Semi-automatic wafer transfersystem for wafer size from 3“ to 200mm

• Cassette to cassette / boat

• Alinger for flat or notch

• Communication with computer via RS232

• ESD option

Comet 2-Station

• Automatic wafer transfer system

• Wafer size from 3“ to 200mm

• Cassette to cassette / boat

• Communication with computer via RS 232

• Safety sensor for cassette and wafer

• Automatic home position

• Possible option

   o BTB, pitch changing

   o Split 25 -> 12/13

   o SECS/GEM

   o Aligner o ESD

Comet 3-Station

•Automatic wafer transfer system

• Wafer size from 3” to 200mm

• Cassette to Cassette / Boat

• Communication with computer via RS 232

• Safety sensor for cassette and wafer

• Automatic home position

• Mögliche Optionen

    o BTB, pitch changing

    o Split 25 -> 12/13, 50 -> 2x25

    o SECS/GEM

    o Aligner o ESD