Wafer
Sorter
The COMET Single Wafer Sorter
offers a product family of flexible and powerful wafer sorters.
The desktop system with two stations features computer-aided
control, offering all freedoms for sorting wafers. It is operated
via the computer's touch screen, using the graphical representation
or via mouse control. With the integrated wafer sensors, the
system first detects the status of the set-up boats. The system
also checks for any cross slotting. For the sorting process,
either the previously programmed functions are used, or the
wafer slot and the target slot are entered interactively via
the touch screen.
The operator level only accepts the released functions. Access
to the configuration and programming of the sorting functions
is protected. These areas can only be accessed after entering
a password. |
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Complex single wafer sorters are available as
floor systems. Models with two, three or
four boat stations are available. Compliant to SEMI standards,
the boats are arranged in a row at the appropriate height
and are therefore easy to operate. The boats are placed on
the stations with the wafers in vertical alignment in the
boat slots. In the model for 150mm wafers, the stations are
equipped with a flat aligner. For Single Wafer Sorters for
200mm wafers, a notch aligner is available, allowing to align
the wafers before reading the wafer ID. For performing the
sorting function, the boats are set upright, placing the wafers
in horizontal alignment. The wafer-ID is read at one station,
and the wafer is placed in the target boat according to the
sorting program.
Request more information.
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