The models M-RES
2xxxM-AL are automatically operating systems. The
wafers are taken according to a recipe from the cassette
and automatically measured by following the given mapping
plan. After completing the measurement the wafer is
returned back into the cassette.
These systems are applied, e.g. in the
process development of EPI, implant-, metallization and
thin film processes of conductive layers or in
manufacturing process monitoring.